| 品名 |
原廠編號 |
SERV |
| ACTUATOR P-UNIT |
4022.436.15554
4022.436.15555
4022.436.15552 |
SERV.502.28211 |
AL SHUTTER+INTERMEDIATE PLATE
(TTL SHUTTER) |
4022.437.10081 |
SERV.454.20391 |
| ALIGN BLOCK 5500/L 60/80/100 |
4022.454.10861 |
SERV.502.28999 |
| CABLE WHR TO GRIPPER ROBOT |
4022.436.12031 |
SERV.436.12031 |
CYMER LENS C
LENS PLANO CONVEX F500 POS C |
4022.454.48111 |
SERV.454.48111 |
| D-UNIT |
4022.435.43664 |
SERV.502.28231 |
| E-PINS GUIDE HOLDER ASSY |
4022.435.07082 |
SERV.435.07082 |
GRIPPER
(GRIPPER COMP) |
4022.435.43707 |
SERV.502.27097 |
| GRIPPER X MOTION (新) |
4022.456.08883
4022.436.15755
4022.435.43709
4022.456.28971 |
SERV.502.27443 |
| INTERNAL REMA-C DUV |
4022.484.45189 |
SERV.502.28508 |
| MARK SENSOR UNIT |
4022.435.43641 |
SERV.435.46835 |
| REMA 100 |
4022.435.00067 |
SERV.435.00067 |
| RS LONGSTROKE CABLE |
8122.389.19923 |
SERV.436.64233 |
SHUTTER 400
(SHUTTER UNIT UV SCAN MODULE) |
4022.455.78253
4022.455.78256 |
SERV.502.27070 |
| SRS R-PIN ASSY II(舊) |
4022.454.64752 |
SERV.502.27360 |
| SWS E-CHUCK TO STONE FLEX F2 (SHORT) |
NA |
SERV.455.23852 |
| UPPER Z-MODULE SCAN ASSY ARMS |
4022.454.66022 |
SERV.454.66022 |
| WRR RACK |
4022.436.46005 |
4022.436.46004 |
